§Single-layer Cr (er=-0.77-j*1.51) photo mask: 8x8x0.1l3 slab, l=157nm
§Observation plane: 4.5x4.5l2 plane, 0.05l below the mask
§Evaluating current
on the volume mesh (70,282 tetrahedron bases) by a five-level MLFMA: 3 hrs., 510 MB of memory, 10
iterations for error=10-3
§Evaluating field on
90x90 observation points: 12 mins., 200 MB of memory (direct computation: 740 mins.)